Features
Each page shows what you enter, what you get back on screen, how the number is produced and where it stops being reliable — so you can decide in a minute whether it fits your process question.
Predict ALD Film Thickness
Set ALD recipe conditions — temperature, pulse, purge, cycles — and get predicted GPC, thickness, uniformity, density and step coverage on one screen.
Predict Step Coverage
Predict step coverage vs aspect ratio for ALD, CVD, and PVD in trenches and vias. View 3D profiles, pinch-off warnings, and stable-process-region maps.
Map CVD Film Uniformity
Enter CVD or PECVD conditions and see a 300 mm wafer uniformity map with non-uniformity grades, contribution breakdown, and variable importance ranking.
Predict Etch Profiles
Predict etch depth, sidewall angle, selectivity, and bowing for single-layer RIE/ALE or DRAM, NAND, and Logic stacked structures with 26 preset layouts.
Calibrate with Your Data
Upload a CSV of measured runs to bend the physics model toward your specific tool. See calibration deltas, confidence bands, and SPC control charts.
Get Your Next Recipe
Set a process goal, choose which knobs to move, and get batch recipe recommendations ranked by expected improvement — powered by Bayesian optimization.